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太阳能行业晶体生长用DIAS红外测温仪

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要生产晶圆,例如要生产太阳能晶圆产品,晶体需要从所谓的晶体生长炉(单晶炉、多晶炉)内的熔液拉出。

 

从熔液形成的晶体生长由晶体化的熔液慢慢冷却形成的。因此,测量熔液的温度很重要,同样,测量加热元件的温度以准确控制过程也很重要。这二个温度需要协调好,以确保晶体生长的优化。

 

Non-contact temperature measurement with pyrometers in crystal growing factories that produce wafers for the solar industry.

Crystals that are produced in crystal growing factories are needed for the production of wafers for the solar industry. To guarantee an optimum crystal growth the temperatures during the process have to be correct. Pyrometers PYROSPOT made by DIAS can realize this measurement task.

 

DIAS pyrometers of series 10,40 or 44 are used for the measurement of the melting temperature. The suitable devices of series 40 and 44 are the types PYROSPOT DS 40N and DS 44N that are short-wave spectral pyrometers in the measurement range between 800 °C and 2500 °C. Depending on the type of system, ratio pyrometersof type PYROSPOT DSR 10N can be used as well. Besides the devices of the series 44 and 10 provide the advantage of a bus-compatible interface for the simplified integration in existing control systems.

 

Different steps of the crystal growing.
Different steps of the crystal growing.
Different steps of the crystal growth.
For the measurement of the melting temperature during the crystal growth and for the measurement of the heating element temperature DIAS has developed special pyrometers PYROSPOT.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Pyrometers with fibre optics and small optical head are preferred used for the measurement of the heating temperature because the space available is limited. These pyrometers of type PYROSPOT DSF 40N and DSF 44N provide a measurement range between 600 °C and 1800 °C for example and small optical heads with only 12 mm aperture. Alternatively, optics with 90°-mirror-attachment or curved fibre optics are used. The measurement spot size is only of some millimeters aperture in all variants.

The growth process is observed and controlled by the optimal interaction of the pyrometer variants for both measurement tasks.

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